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Автор O A Popov
Автор S Y Shapoval
Автор M D Yoder Jr
Дата выпуска 1992-03-01
dc.description Microwave plasmas (f= omega /2 pi =2.45 GHz, 200-1000 W) were excited and maintained at low static magnetic fields, B=300-450 G and gas pressures of 0.2-10 mTorr. Two modes were found and studied: low plasma density mode with N<sub>e</sub><N<sub>cr</sub>=7.4*10<sup>10</sup> cm<sup>-3</sup>, and high (overdense, N<sub>e</sub>>N<sub>cr</sub>) plasma mode. The resonance transition from low- and high-mode plasma was observed when the magnetic field near the microwave introduction (vacuum) window was B<sub>w</sub>=435-440 G. It was attributed to the second gyratron harmonic resonance omega =2 omega <sub>BS</sub>. Mechanisms of microwave power absorption at B<B<sub>ce</sub>=875 G are discussed.
Формат application.pdf
Издатель Institute of Physics Publishing
Название 2.45 GHz microwave plasmas at magnetic fields below ECR
Тип paper
DOI 10.1088/0963-0252/1/1/002
Electronic ISSN 1361-6595
Print ISSN 0963-0252
Журнал Plasma Sources Science and Technology
Том 1
Первая страница 7
Последняя страница 12
Аффилиация O A Popov; Microsci. Inc., Norwell, MA, USA
Аффилиация S Y Shapoval; Microsci. Inc., Norwell, MA, USA
Аффилиация M D Yoder Jr; Microsci. Inc., Norwell, MA, USA
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