Автор |
O A Popov |
Автор |
S Y Shapoval |
Автор |
M D Yoder Jr |
Дата выпуска |
1992-03-01 |
dc.description |
Microwave plasmas (f= omega /2 pi =2.45 GHz, 200-1000 W) were excited and maintained at low static magnetic fields, B=300-450 G and gas pressures of 0.2-10 mTorr. Two modes were found and studied: low plasma density mode with N<sub>e</sub><N<sub>cr</sub>=7.4*10<sup>10</sup> cm<sup>-3</sup>, and high (overdense, N<sub>e</sub>>N<sub>cr</sub>) plasma mode. The resonance transition from low- and high-mode plasma was observed when the magnetic field near the microwave introduction (vacuum) window was B<sub>w</sub>=435-440 G. It was attributed to the second gyratron harmonic resonance omega =2 omega <sub>BS</sub>. Mechanisms of microwave power absorption at B<B<sub>ce</sub>=875 G are discussed. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Название |
2.45 GHz microwave plasmas at magnetic fields below ECR |
Тип |
paper |
DOI |
10.1088/0963-0252/1/1/002 |
Electronic ISSN |
1361-6595 |
Print ISSN |
0963-0252 |
Журнал |
Plasma Sources Science and Technology |
Том |
1 |
Первая страница |
7 |
Последняя страница |
12 |
Аффилиация |
O A Popov; Microsci. Inc., Norwell, MA, USA |
Аффилиация |
S Y Shapoval; Microsci. Inc., Norwell, MA, USA |
Аффилиация |
M D Yoder Jr; Microsci. Inc., Norwell, MA, USA |
Выпуск |
1 |