| Автор | H Sugai |
| Автор | H Toyoda |
| Автор | K Nakano |
| Автор | N Isomura |
| Дата выпуска | 1995-08-01 |
| dc.description | A biased optical probe (BOP) method, i.e. novel technique for measurements of the electron energy distribution function (EEDF) in a range of such high energies as 10-50 eV has been developed. This method is based on the optical emission induced by electrons passing through a negatively biased mesh in a plasma. The BOP method was used to measure the EEDF in a DC glow discharge in He/Xe mixture while the low-energy part (<10 eV) of the EEDF was measured using the conventional Druyvesteyn method. The measured distribution function considerably deviates from an ideal Maxwellian distribution, because of abundant high-energy electrons generated in a cathode fall. On the contrary, the EEDF measured in a low-pressure inductive RF discharge was found to follow a single Maxwellian distribution over a wide energy range. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | A biased optical probe method for measurements of electron energy distribution in a plasma |
| Тип | paper |
| DOI | 10.1088/0963-0252/4/3/006 |
| Electronic ISSN | 1361-6595 |
| Print ISSN | 0963-0252 |
| Журнал | Plasma Sources Science and Technology |
| Том | 4 |
| Первая страница | 366 |
| Последняя страница | 372 |
| Аффилиация | H Sugai; Dept. of Electr. Eng., Nagoya Univ., Japan |
| Аффилиация | H Toyoda; Dept. of Electr. Eng., Nagoya Univ., Japan |
| Аффилиация | K Nakano; Dept. of Electr. Eng., Nagoya Univ., Japan |
| Аффилиация | N Isomura; Dept. of Electr. Eng., Nagoya Univ., Japan |
| Выпуск | 3 |
