| Автор | S Kufner |
| Автор | M Kufner |
| Автор | M Frank |
| Автор | A Muller |
| Автор | K -H Brenner |
| Дата выпуска | 1993-03-01 |
| dc.description | An integration of microoptical components to three-dimensional systems is of interest for optical information processing as well as for optical interconnections. Polymethyl methacrylate (PMMA) is a suitable substrate material, because microprisms, beamsplitters and microlenses can be integrated monolithically in the same substrate by deep proton irradiation. The microcomponents can be combined to compact microoptical imaging systems which are easy to align. The fabrication method and the imaging properties of this system are discussed. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | 3D integration of refractive microoptical components by deep proton irradiation |
| Тип | paper |
| DOI | 10.1088/0963-9659/2/2/004 |
| Electronic ISSN | 1361-6617 |
| Print ISSN | 0963-9659 |
| Журнал | Pure and Applied Optics: Journal of the European Optical Society Part A |
| Том | 2 |
| Первая страница | 111 |
| Последняя страница | 124 |
| Аффилиация | S Kufner; Phys. Inst., Erlangen-Nuremberg Univ., Germany |
| Аффилиация | M Kufner; Phys. Inst., Erlangen-Nuremberg Univ., Germany |
| Аффилиация | M Frank; Phys. Inst., Erlangen-Nuremberg Univ., Germany |
| Аффилиация | A Muller; Phys. Inst., Erlangen-Nuremberg Univ., Germany |
| Аффилиация | K -H Brenner; Phys. Inst., Erlangen-Nuremberg Univ., Germany |
| Выпуск | 2 |
