The identification of sterilization agents is mandatory to achieve sterilization mechanisms in low-pressure discharges. A detailed account of each agent is required for improvements, development and establishment of plasma sterilization as an alternative to traditional sterilization processes. Sterilization agents are VUV and UV radiation, photodesorption producing volatile species and etching of spore coat and membrane. This work focuses on VUV and UV radiation as a sterilization agent of Bacillus atrophaeus spores. Four wavelength ranges are distinguished: the emission spectra above 300 nm, above 235 nm, above 112 nm and a full emission spectrum including active species. The range from 235 up to 300 nm without active species is identified to be the most capable for sterilizing Bacillus atrophaeus spores.