| Автор | Zhu, Xi-Ming |
| Автор | Chen, Wen-Cong |
| Автор | Li, Jiang |
| Автор | Pu, Yi-Kang |
| Дата выпуска | 2009-01-21 |
| dc.description | A simple collisional–radiative model for argon and xenon is used, in conjunction with optical emission spectroscopy (line-ratio technique), to determine the electron temperature and electron density in low-pressure discharges containing argon and xenon. Satisfactory agreement is obtained between this method and the Langmuir probe for an inductively coupled plasma containing neon, argon and xenon. This method is applied for a capacitive discharge containing fluorocarbon, argon and xenon. The electron temperatures and electron densities obtained under various discharge conditions are compared with those reported in the literature by other techniques. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2009 IOP Publishing Ltd |
| Название | Determining the electron temperature and the electron density by a simple collisional–radiative model of argon and xenon in low-pressure discharges |
| Тип | paper |
| DOI | 10.1088/0022-3727/42/2/025203 |
| Electronic ISSN | 1361-6463 |
| Print ISSN | 0022-3727 |
| Журнал | Journal of Physics D: Applied Physics |
| Том | 42 |
| Первая страница | 25203 |
| Последняя страница | 25210 |
| Аффилиация | Zhu, Xi-Ming; Department of Engineering Physics, Tsinghua University, Beijing 100084, People's Republic of China |
| Аффилиация | Chen, Wen-Cong; Department of Engineering Physics, Tsinghua University, Beijing 100084, People's Republic of China |
| Аффилиация | Li, Jiang; Department of Engineering Physics, Tsinghua University, Beijing 100084, People's Republic of China |
| Аффилиация | Pu, Yi-Kang; Department of Engineering Physics, Tsinghua University, Beijing 100084, People's Republic of China |
| Выпуск | 2 |
