Автор |
Li, Jiang |
Автор |
Zhu, Xi-Ming |
Автор |
Pu, Yi-Kang |
Дата выпуска |
2010-09-01 |
dc.description |
The population distribution of argon atoms in Paschen 1s levels in inductively coupled plasmas is investigated using a collisional–radiative model and the optical emission spectroscopy method. The modelling results of population densities are in good agreement with the experimental ones. According to this model, the population distribution of 1s levels is affected mainly by the electron impact transfer and the resonance radiation processes. As a result, a simple relationship on the population ratio of 1s<sub>4</sub> and 1s<sub>5</sub> is obtained. From this relationship, three kinetic regimes with different electron densities and discharge pressures are identified, which can be used to characterize the population distribution of argon 1s levels in inductively coupled plasmas. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Копирайт |
2010 IOP Publishing Ltd |
Название |
The population distribution of argon atoms in Paschen 1s levels in an inductively coupled plasma |
Тип |
paper |
DOI |
10.1088/0022-3727/43/34/345202 |
Electronic ISSN |
1361-6463 |
Print ISSN |
0022-3727 |
Журнал |
Journal of Physics D: Applied Physics |
Том |
43 |
Первая страница |
345202 |
Последняя страница |
345212 |
Аффилиация |
Li, Jiang; Department of Engineering Physics, Tsinghua University, Beijing 100084, People's Republic of China |
Аффилиация |
Zhu, Xi-Ming; Department of Engineering Physics, Tsinghua University, Beijing 100084, People's Republic of China |
Аффилиация |
Pu, Yi-Kang; Department of Engineering Physics, Tsinghua University, Beijing 100084, People's Republic of China |
Выпуск |
34 |