| Автор | Theiß, S |
| Автор | Bibinov, N |
| Автор | Bagcivan, N |
| Автор | Ewering, M |
| Автор | Awakowicz, P |
| Автор | Bobzin, K |
| Дата выпуска | 2010-02-24 |
| dc.description | This paper deals with the time resolved optical emission spectroscopy of a high power pulse magnetron sputtering (HPPMS) physical vapour deposition coating process. With an industrial coating unit CC800/9 HPPMS (CemeCon AG, Würselen) a (Cr,Al,Si)N coating was deposited. During the coating process, an absolute calibrated Echelle spectrometer (ESA-3000) measured the intensities of the spectral lines of chromium (Cr), aluminium (Al) and molecular bands of nitrogen (N<sub>2</sub>). Time resolved measurements enable us to calculate different parameters such as the average velocity of sputtered Al and Cr atoms or the internal plasma parameters electron density n<sub>e</sub> and electron temperature kT<sub>e</sub> with a time resolution of 20 µs. With these parameters, we determine the ionization rates of Al, Cr, Ar and Kr atoms and the deposition densities of Al and Cr atoms. Thus simulated deposition densities of 1.75 × 10<sup>20</sup> m<sup>−2</sup> s<sup>−1</sup> for chromium and 1.7 × 10<sup>22</sup> m<sup>−2</sup> s<sup>−1</sup> for aluminium are reached. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2010 IOP Publishing Ltd |
| Название | Time resolved optical emission spectroscopy of an HPPMS coating process |
| Тип | paper |
| DOI | 10.1088/0022-3727/43/7/075205 |
| Electronic ISSN | 1361-6463 |
| Print ISSN | 0022-3727 |
| Журнал | Journal of Physics D: Applied Physics |
| Том | 43 |
| Первая страница | 75205 |
| Последняя страница | 75212 |
| Аффилиация | Theiß, S; Surface Engineering Institute, RWTH Aachen University, Augustinerbach 4-22, D-52062 Aachen, Germany |
| Аффилиация | Bibinov, N; Institute for Electrical Engineering and Plasma Technology, Ruhr-Universität Bochum, D-44780 Bochum, Germany |
| Аффилиация | Bagcivan, N; Surface Engineering Institute, RWTH Aachen University, Augustinerbach 4-22, D-52062 Aachen, Germany |
| Аффилиация | Ewering, M; Surface Engineering Institute, RWTH Aachen University, Augustinerbach 4-22, D-52062 Aachen, Germany |
| Аффилиация | Awakowicz, P; Institute for Electrical Engineering and Plasma Technology, Ruhr-Universität Bochum, D-44780 Bochum, Germany |
| Аффилиация | Bobzin, K; Surface Engineering Institute, RWTH Aachen University, Augustinerbach 4-22, D-52062 Aachen, Germany |
| Выпуск | 7 |
