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Автор Wang Xin-Hua
Автор Wang Xiao-Liang
Автор Feng Chun
Автор Xiao Hong-Ling
Автор Yang Cui-Bai
Автор Wang Jun-Xi
Автор Wang Bao-Zhu
Автор Ran Jun-Xue
Автор Wang Cui-Mei
Дата выпуска 2008-01-01
dc.description Pt/AlGaN/AlN/GaN Schottky diodes are fabricated and characterized for hydrogen sensing. The Pt Schottky contact and the Ti/Al/Ni/Au ohmic contact are formed by evaporation. Both the forward and reverse currents of the device increase greatly when exposed to hydrogen gas. A shift of 0.3V at 300K is obtained at a fixed forward current after switching from N<sub>2</sub> to 10%H<sub>2</sub>+N<sub>2</sub>. The sensor responses under different concentrations from 50ppm H<sub>2</sub> to 10%H<sub>2</sub>+N<sub>2</sub> at 373K are investigated. Time dependences of the device forward current at 0.5V forward bias in N<sub>2</sub> and air atmosphere at 300 and 373K are compared. Oxygen in air accelerates the desorption of the hydrogen and the recovery of the sensor. Finally, the decrease of the Schottky barrier height and sensitivity of the sensor are calculated.
Формат application.pdf
Издатель Institute of Physics Publishing
Копирайт 2008 Chinese Physical Society and IOP Publishing Ltd
Название Hydrogen Sensors Based on AlGaN/AlN/GaN Schottky Diodes
Тип paper
DOI 10.1088/0256-307X/25/1/072
Electronic ISSN 1741-3540
Print ISSN 0256-307X
Журнал Chinese Physics Letters
Том 25
Первая страница 266
Последняя страница 269
Выпуск 1

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