Автор |
Park, Jin Gyu |
Автор |
Zhang, Chuck |
Автор |
Liang, Richard |
Автор |
Wang, Ben |
Дата выпуска |
2007-10-10 |
dc.description |
Sub-100 nm holes were made on a highly oriented pyrolytic graphite (HOPG) surface using a metal-coated atomic force microscope (AFM) tip and carbon nanotube. HOPG was used as a substrate (work piece) and a metal-coated (10 nm Cr/30 nm Au) Si AFM tip served as the other electrode. A negative voltage pulse was applied to the AFM tip to fabricate holes as small as 10 nm in diameter on the HOPG surface with a depth of 0.34 nm, which corresponds to a single layer of graphene. We also explored an individual multi-walled carbon nanotube (MWNT) attached to the AFM tip for nanoscale machining. Unlike the pyramidal shape of the AFM tip, the high aspect ratio of a carbon nanotube can make it possible to form deeper holes at even smaller surface diameter. The hole-formation mechanism is related to the chemical reaction of graphite with adsorbed water and tunneling electrons from the tip to substrate. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Копирайт |
IOP Publishing Ltd |
Название |
Nano-machining of highly oriented pyrolytic graphite using conductive atomic force microscope tips and carbon nanotubes |
Тип |
paper |
DOI |
10.1088/0957-4484/18/40/405306 |
Electronic ISSN |
1361-6528 |
Print ISSN |
0957-4484 |
Журнал |
Nanotechnology |
Том |
18 |
Первая страница |
405306 |
Последняя страница |
405311 |
Аффилиация |
Park, Jin Gyu; Department of Industrial and Manufacturing Engineering and High-Performance Materials Institute, Florida State University, Tallahassee, FL 32310, USA |
Аффилиация |
Zhang, Chuck; Department of Industrial and Manufacturing Engineering and High-Performance Materials Institute, Florida State University, Tallahassee, FL 32310, USA |
Аффилиация |
Liang, Richard; Department of Industrial and Manufacturing Engineering and High-Performance Materials Institute, Florida State University, Tallahassee, FL 32310, USA |
Аффилиация |
Wang, Ben; Department of Industrial and Manufacturing Engineering and High-Performance Materials Institute, Florida State University, Tallahassee, FL 32310, USA |
Выпуск |
40 |