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Автор Park, Jin Gyu
Автор Zhang, Chuck
Автор Liang, Richard
Автор Wang, Ben
Дата выпуска 2007-10-10
dc.description Sub-100 nm holes were made on a highly oriented pyrolytic graphite (HOPG) surface using a metal-coated atomic force microscope (AFM) tip and carbon nanotube. HOPG was used as a substrate (work piece) and a metal-coated (10 nm Cr/30 nm Au) Si AFM tip served as the other electrode. A negative voltage pulse was applied to the AFM tip to fabricate holes as small as 10 nm in diameter on the HOPG surface with a depth of 0.34 nm, which corresponds to a single layer of graphene. We also explored an individual multi-walled carbon nanotube (MWNT) attached to the AFM tip for nanoscale machining. Unlike the pyramidal shape of the AFM tip, the high aspect ratio of a carbon nanotube can make it possible to form deeper holes at even smaller surface diameter. The hole-formation mechanism is related to the chemical reaction of graphite with adsorbed water and tunneling electrons from the tip to substrate.
Формат application.pdf
Издатель Institute of Physics Publishing
Копирайт IOP Publishing Ltd
Название Nano-machining of highly oriented pyrolytic graphite using conductive atomic force microscope tips and carbon nanotubes
Тип paper
DOI 10.1088/0957-4484/18/40/405306
Electronic ISSN 1361-6528
Print ISSN 0957-4484
Журнал Nanotechnology
Том 18
Первая страница 405306
Последняя страница 405311
Аффилиация Park, Jin Gyu; Department of Industrial and Manufacturing Engineering and High-Performance Materials Institute, Florida State University, Tallahassee, FL 32310, USA
Аффилиация Zhang, Chuck; Department of Industrial and Manufacturing Engineering and High-Performance Materials Institute, Florida State University, Tallahassee, FL 32310, USA
Аффилиация Liang, Richard; Department of Industrial and Manufacturing Engineering and High-Performance Materials Institute, Florida State University, Tallahassee, FL 32310, USA
Аффилиация Wang, Ben; Department of Industrial and Manufacturing Engineering and High-Performance Materials Institute, Florida State University, Tallahassee, FL 32310, USA
Выпуск 40

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