Future micro/nanodevices will contain very small features such that liquid lubrication is not practical and inherent lubricity is needed. In this study, a nanoscale friction investigation was carried out during the manipulation of Au and SiO₂ nanoparticles on silicon using atomic force microscopy (AFM). Nanoparticle sliding was characterized by quantifying the lateral force associated with the AFM tip twisting as it hits the particle edge. The friction force varies with particle area and humidity, illustrating how meniscus forces on nanoparticles affect friction. A large tip slid on the nanoparticle-coated surface exhibited friction reduction due to nanoparticle sliding and contact area reduction.