| Автор | Xia, Qiangfei |
| Автор | Chou, Stephen Y |
| Дата выпуска | 2009-07-15 |
| dc.description | We propose and demonstrate a new method for fabricating periodic arrays of metal nanodots over a large area. In this method, metal nanogratings were first patterned on a substrate by nanoimprint lithography and lift-off, and were then melted using a single excimer laser pulse. We found that the laser melting broke the metal nanogratings into periodic nanodots. Furthermore, we demonstrated the control of the nanodot array pitch using a substrate surface topology, and the fabrication of two-dimensional periodic metal nanodot arrays of 70 nm diameter and 200 nm period. The fragmentation of lines into dots was attributed to the Rayleigh instability in a liquid cylinder. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | IOP Publishing Ltd |
| Название | The fabrication of periodic metal nanodot arrays through pulsed laser melting induced fragmentation of metal nanogratings |
| Тип | paper |
| DOI | 10.1088/0957-4484/20/28/285310 |
| Electronic ISSN | 1361-6528 |
| Print ISSN | 0957-4484 |
| Журнал | Nanotechnology |
| Том | 20 |
| Первая страница | 285310 |
| Последняя страница | 285314 |
| Аффилиация | Chou, Stephen Y; |
| Аффилиация | Xia, Qiangfei; Nanostructure Laboratory, Department of Electrical Engineering, Princeton University, Princeton, NJ 08544, USA |
| Выпуск | 28 |
