| Автор | Schift, Helmut |
| Автор | Kim, Geehong |
| Автор | Lee, Jaejong |
| Автор | Gobrecht, Jens |
| Дата выпуска | 2009-09-02 |
| dc.description | A method for continuous 3D visualization of the mold filling at a microscopic level during a thermoplastic nanoimprint process was developed. It is based on superposition of micrographs of a series of different stages of imprint. It was applied to two common 3D microscopies with different resolution limitations. Due to advanced image processing, the animated movie sequence, available as supplementary multimedia information in the online version of this journal, gives an unprecedented insight into the complex polymer flow and shows how voids are forming and vanishing during the imprint process around micropillars. The method has advantages over current real-time methods and can be used as an analytical tool for optimization of processes and improvement of stamp design down to the sub-10 nm nanometer range. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | IOP Publishing Ltd |
| Название | 3D visualization of mold filling stages in thermal nanoimprint by white light interferometry and atomic force microscopy |
| Тип | paper |
| DOI | 10.1088/0957-4484/20/35/355301 |
| Electronic ISSN | 1361-6528 |
| Print ISSN | 0957-4484 |
| Журнал | Nanotechnology |
| Том | 20 |
| Первая страница | 355301 |
| Последняя страница | 355306 |
| Аффилиация | Schift, Helmut; Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, 5232 Villigen PSI, Switzerland |
| Аффилиация | Kim, Geehong; Korea Institute of Machinery and Materials, 171 Jang-dong, Yusung-ku, Daejeon 305-600, Korea |
| Аффилиация | Lee, Jaejong; Korea Institute of Machinery and Materials, 171 Jang-dong, Yusung-ku, Daejeon 305-600, Korea |
| Аффилиация | Gobrecht, Jens; Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, 5232 Villigen PSI, Switzerland |
| Выпуск | 35 |
