Printing of sub-20 nm wide graphene ribbon arrays using nanoimprinted graphite stamps and electrostatic force assisted bonding
Wang, Chao; Morton, Keith J; Fu, Zengli; Li, Wen-Di; Chou, Stephen Y; Wang, Chao; Nanostructure Laboratory, Department of Electrical Engineering, Princeton University, USA; Morton, Keith J; Nanostructure Laboratory, Department of Electrical Engineering, Princeton University, USA; Fu, Zengli; Nanostructure Laboratory, Department of Electrical Engineering, Princeton University, USA; Li, Wen-Di; Nanostructure Laboratory, Department of Electrical Engineering, Princeton University, USA; Chou, Stephen Y; Nanostructure Laboratory, Department of Electrical Engineering, Princeton University, USA
Журнал:
Nanotechnology
Дата:
2011-11-04
Аннотация:
Nano-graphene ribbons are promising in many electronic applications, as their bandgaps can be opened by reducing the widths, e.g. below 20 nm. However, a high-throughput method to pattern large-area nano-graphene features is still not available. Here we report a fabrication method of sub-20 nm ribbons on graphite stamps by nanoimprint lithography and a transfer-printing of the graphene ribbons to a Si wafer using electrostatic force assisted bonding. These methods provide a path for fast and high-throughput nano-graphene device production.
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