Dosing system for the nanolitre range, fabricated with the AMANDA process
P Shao; Z Rummler; W K Schomburg; P Shao; Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Postfach 3640, D-76021 Karlsruhe, Germany; Z Rummler; Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Postfach 3640, D-76021 Karlsruhe, Germany; W K Schomburg; Forschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, Postfach 3640, D-76021 Karlsruhe, Germany
Журнал:
Journal of Micromechanics and Microengineering
Дата:
2003-07-01
Аннотация:
We present a dosing system, which consists of four microvalves (presented by Rogge et al in the Proceedings of Eurosensors XVI, Prague, 2002, pp 109–110) for controlling and a movable membrane for flow measurement that divides a cavity into two chambers. The flow rate is determined from the straining of the membrane caused by the entering fluid. The displaced volume is detected by strain gauges integrated in the membrane. The overall dimensions of the membrane and the entire system are 2 mm and 10 × 50 × 6 mm<sup>3</sup>, respectively. A simple control was coded for dosing a certain amount of volume. This simple system has already achieved an accuracy of about 10. The dosing system is manufactured with the AMANDA process, which allows for low-cost production of microcomponents from polymers.
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