| Автор | Ilya Avdeev |
| Автор | Miklos Gyimesi |
| Автор | Michael Lovell |
| Автор | Dale Ostergaard |
| Дата выпуска | 2004-11-01 |
| dc.description | Significant advances in MEMS fabrication technology has led to the ability to create devices and components that are geometrically complex. In order to optimize the performance of these increasingly complex components, efficient finite element modelling techniques are required to understand their coupled electromechanical behaviour. In the present investigation, a novel three-dimensional (3D) distributed strongly coupled electromechanical transducer finite element is introduced. Based on energy conservation principles, the element has internal morphing to accurately capture the underlying mechanical and electrostatic domains. To demonstrate the accuracy of the new element, several numerical examples are presented and compared to available experimental data. The range of applicability of the new element, as related to the design of MEMS devices, is subsequently discussed. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2004 IOP Publishing Ltd |
| Название | Strongly coupled three-dimensional finite element transducer |
| Тип | paper |
| DOI | 10.1088/0960-1317/14/11/009 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 14 |
| Первая страница | 1491 |
| Последняя страница | 1502 |
| Аффилиация | Ilya Avdeev; Department of Mechanical Engineering, University of Pittsburgh, 647 Benedum Engineering Hall, 3700 O'Hara Street, Pittsburgh, PA 15261, USA |
| Аффилиация | Miklos Gyimesi; Department of Mechanical Engineering, University of Pittsburgh, 647 Benedum Engineering Hall, 3700 O'Hara Street, Pittsburgh, PA 15261, USA |
| Аффилиация | Michael Lovell; Department of Mechanical Engineering, University of Pittsburgh, 647 Benedum Engineering Hall, 3700 O'Hara Street, Pittsburgh, PA 15261, USA |
| Аффилиация | Dale Ostergaard; Department of Mechanical Engineering, University of Pittsburgh, 647 Benedum Engineering Hall, 3700 O'Hara Street, Pittsburgh, PA 15261, USA |
| Выпуск | 11 |
