| Автор | S Deladi |
| Автор | V Svetovoy |
| Автор | G J M Krijnen |
| Автор | M C Elwenspoek |
| Дата выпуска | 2004-12-01 |
| dc.description | A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO<sub>2</sub> releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2004 IOP Publishing Ltd |
| Название | Flash release—an alternative for releasing complex MEMS devices |
| Тип | paper |
| DOI | 10.1088/0960-1317/14/12/009 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 14 |
| Первая страница | 1659 |
| Последняя страница | 1664 |
| Аффилиация | S Deladi; MESA Research Institute, University of Twente/Transducers Science & Technology, PO Box 217, 7500 AE Enschede, The Netherlands |
| Аффилиация | V Svetovoy; MESA Research Institute, University of Twente/Transducers Science & Technology, PO Box 217, 7500 AE Enschede, The Netherlands |
| Аффилиация | G J M Krijnen; MESA Research Institute, University of Twente/Transducers Science & Technology, PO Box 217, 7500 AE Enschede, The Netherlands |
| Аффилиация | M C Elwenspoek; MESA Research Institute, University of Twente/Transducers Science & Technology, PO Box 217, 7500 AE Enschede, The Netherlands |
| Выпуск | 12 |
