Rapid prototyping of polymer-based MEMS devices using UV YAG laser
K C Yung; S M Mei; T M Yue; K C Yung; Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong; S M Mei; Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong; T M Yue; Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong
Журнал:
Journal of Micromechanics and Microengineering
Дата:
2004-12-01
Аннотация:
This paper deals with the laser micro processing technology in the fabrication of micro-electro-mechanical system (MEMS) device. A polymer-based capacitive micro accelerometer is designed and modeled in this paper, and is fabricated with laser micromachining and micro patterning technologies. The fabricated micro accelerometer is finally experimentally verified by measuring the shock of a dropping hammer. It is demonstrated that pulsed UV laser micro processing technology provides a quite suitable fabrication method for polymer-based MEMS rapid prototyping and small volume production.
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