| Автор | R R A Syms |
| Автор | H Zou |
| Автор | J Stagg |
| Автор | H Veladi |
| Дата выпуска | 2004-12-01 |
| dc.description | An iris-type variable aperture fabricated using microelectromechanical systems (MEMS) technology is described. The device contains a number of shutter blades, which are each driven by a separate microactuator, and translated synchronously to create a variable polygonal aperture. The optical performance of devices with different numbers of blades is compared using simple analytic models and diffraction theory. The mechanism is simulated by finite element analysis. Four-blade devices driven by buckling mode electrothermal actuators are formed by double-sided patterning and deep reactive ion etching of bonded silicon-on-insulator and characterized experimentally. Symmetric deflections are obtained, and used to create a square pupil. Variable attenuation is demonstrated using optical fibres with thermally expanded cores. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2004 IOP Publishing Ltd |
| Название | Sliding-blade MEMS iris and variable optical attenuator |
| Тип | paper |
| DOI | 10.1088/0960-1317/14/12/015 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 14 |
| Первая страница | 1700 |
| Последняя страница | 1710 |
| Аффилиация | R R A Syms; Optical and Semiconductor Devices Group, Electrical and Electronic Engineering Department, Imperial College London, Exhibition Road, London SW7 2BT, UK |
| Аффилиация | H Zou; Optical and Semiconductor Devices Group, Electrical and Electronic Engineering Department, Imperial College London, Exhibition Road, London SW7 2BT, UK |
| Аффилиация | J Stagg; Optical and Semiconductor Devices Group, Electrical and Electronic Engineering Department, Imperial College London, Exhibition Road, London SW7 2BT, UK |
| Аффилиация | H Veladi; Optical and Semiconductor Devices Group, Electrical and Electronic Engineering Department, Imperial College London, Exhibition Road, London SW7 2BT, UK |
| Выпуск | 12 |
