| Автор | Lingbin Kong |
| Автор | Xinjian Yi |
| Автор | Ke Lian |
| Автор | Sihai Chen |
| Дата выпуска | 2004-08-01 |
| dc.description | To improve the performance of infrared focal plane arrays, multi-phase-level 256 × 256 element diffractive microlens arrays with a center wavelength of 4 µm are designed using a novel partial etching method based on the scalar diffraction theory and computer aided design. A testing system is established with an optical communication semiconductor laser and detector for measuring the diffraction efficiency and point spread function of the designed multi-phase diffractive microlens arrays. The measurement results indicate that the measured diffraction efficiency of 16-phase Si and quartz diffractive microlens arrays are 83.7% and 87.5%, respectively, and the optical response of the infrared focal plane arrays with integration of the diffractive microlens arrays is increased by a factor of 2.23. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2004 IOP Publishing Ltd |
| Название | Design and optical performance research of multi-phase diffractive microlens arrays |
| Тип | paper |
| DOI | 10.1088/0960-1317/14/8/003 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 14 |
| Первая страница | 1135 |
| Последняя страница | 1139 |
| Выпуск | 8 |
