| Автор | Yao-Joe Yang |
| Автор | Szu-Yuan Cheng |
| Автор | Kuo-Yeh Shen |
| Дата выпуска | 2004-08-01 |
| dc.description | In this paper, a macromodeling procedure for coupled-domain MEMS devices with electrostatic and electrothermal effects is presented. Transient fully-meshed simulations using finite-element or finite-difference methods (FEM/FDM) for coupled-domain systems require tremendous computational cost. Therefore, in this work, we use the Karhunen-Loeve/Galerkin technique for extracting the macromodels that capture the system's nonlinear behaviors, such as the structural dynamics, the squeeze-film damping and the electrostatic actuation. In addition, using the Arnoldi-based technique, the thermal macromodels are reduced from the linear FEM/FDM models. The system dynamic behavior is successfully reproduced by using these macromodels. Compared with the fully-meshed model, the computational cost of the macromodels is reduced by at least a factor of 500 with less than 1% error. Experimental verifications for the simulated results are also provided. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2004 IOP Publishing Ltd |
| Название | Macromodeling of coupled-domain MEMS devices with electrostatic and electrothermal effectsThis paper is an extension of the paper that was orally presented at Transducers '03 (Paper ID:3A3.5). |
| Тип | paper |
| DOI | 10.1088/0960-1317/14/8/011 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 14 |
| Первая страница | 1190 |
| Последняя страница | 1196 |
| Аффилиация | Yao-Joe Yang; Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, ROC |
| Аффилиация | Szu-Yuan Cheng; Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, ROC |
| Аффилиация | Kuo-Yeh Shen; Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, ROC |
| Выпуск | 8 |
