| Автор | S Deladi |
| Автор | G J M Krijnen |
| Автор | M C Elwenspoek |
| Дата выпуска | 2004-09-01 |
| dc.description | Polycrystalline-Si microactuators based on electrothermal principles exhibit many interesting features but their practical use is severely limited by permanent damage that may occur due to accidental overheating. Under these conditions, polycrystalline-Si structures will display irreversible structural changes ranging from slight geometrical deformations to complete damage. In this paper, an approach is presented to avoid permanent structural deformation of B-doped polycrystalline-Si based electrothermal actuators by overheating. The method allows us to distinguish reversible and irreversible actuation conditions and is demonstrated under environmental and vacuum conditions. It enables full utilization of the capabilities of B-doped polycrystalline-Si based electrothermal actuators with reproducible performance. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2004 IOP Publishing Ltd |
| Название | Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based electrothermal actuators |
| Тип | paper |
| DOI | 10.1088/0960-1317/14/9/005 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 14 |
| Первая страница | S31 |
| Последняя страница | S36 |
| Аффилиация | S Deladi; MESA+ Research Institute, University of Twente/Transducers Science and Technology, PO Box 217, 7500 AE Enschede, The Netherlands |
| Аффилиация | G J M Krijnen; MESA+ Research Institute, University of Twente/Transducers Science and Technology, PO Box 217, 7500 AE Enschede, The Netherlands |
| Аффилиация | M C Elwenspoek; MESA+ Research Institute, University of Twente/Transducers Science and Technology, PO Box 217, 7500 AE Enschede, The Netherlands |
| Выпуск | 9 |
