| Автор | Lin, Tsung-Hung |
| Автор | Hung, Shih-Yu |
| Автор | Yang, Hsiharng |
| Автор | Chao, Ching-Kong |
| Дата выпуска | 2007-03-01 |
| dc.description | A systematic approach to achieve a LRHH (low roughness and high hardness) electroforming process is developed in this study. Because electroformed molds with low roughness and high hardness are required for microlens array fabrication using the LIGA-like process, the invented Ni–Co alloy-pressurized electroforming process is used to fabricate a metallic micro-mold for microlens array molding. The electrolyte parameters such as Co content, current density, brightener content, pH value and temperature will be examined with respect to roughness and hardness. An artificial neural network (ANN) is used to construct a system model that accurately predicts the responses for arbitrary parameter settings. A genetic algorithm (GA) is applied to minimize the surface roughness and improve the micro-mold hardness. The results show that the micro-mold surface roughness and hardness could be significantly improved using the ANN/GA approach. A LRHH electroforming process is carried out using parameter design to improve the surface morphology and increase the service life of the micro-mold during the forming process. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2007 IOP Publishing Ltd |
| Название | Fabrication of a microlens array electroformed mold with low roughness and high hardness |
| Тип | paper |
| DOI | 10.1088/0960-1317/17/3/001 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 17 |
| Первая страница | 419 |
| Последняя страница | 425 |
| Последняя страница | 425 |
| Аффилиация | Lin, Tsung-Hung; Department of Mechanical Engineering, National Taiwan University of Science and Technology, 43 Sec. 4 Keelung Rd., Taipei 106, Taiwan |
| Аффилиация | Hung, Shih-Yu; Department of Automation Engineering, Nan Kai Institute of Technology, 568 Chung Cheng Rd., Tsaotun, Nantou 542, Taiwan |
| Аффилиация | Yang, Hsiharng; Institute of Precision Engineering, National Chung Hsing University, 250 Kuo kuang Rd, Taichung 402, Taiwan |
| Аффилиация | Chao, Ching-Kong; Department of Mechanical Engineering, National Taiwan University of Science and Technology, 43 Sec. 4 Keelung Rd., Taipei 106, Taiwan |
| Выпуск | 3 |
