| Автор | Lu, Michael S-C |
| Автор | Wu, Zhong-Hong |
| Автор | Huang, Chia-En |
| Автор | Hung, Shi-Jie |
| Автор | Chen, Meng-Huei |
| Автор | King, Ya-Chin |
| Дата выпуска | 2007-03-01 |
| dc.description | This paper presents the design, fabrication and characterization of CMOS (complementary metal oxide semiconductor) micromachined grippers with on-chip photo detectors placed beneath the gripping sites. The fabrication features a combination of metal wet etch and sacrificial polysilicon etch for structural release. The fabricated microstructure contains metal and dielectric layers, plus a polysilicon heater for electrothermal actuation. For an applied power of 6 mW, one arm of the gripper produces a 3.6 µm in-plane displacement and a 1.6 µm out-of-plane displacement. The corresponding heater temperature is 220 °C, and the temperature elevation at the tip is only 28 °C. The measured sensitivity and dynamic range of the photo detector are 1.42 V lux<sup>−1</sup> s and 48.5 dB, respectively. For measurements with and without grabbing a polystyrene bead, the difference of sensed voltages is 0.06 V at 100 lux. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2007 IOP Publishing Ltd |
| Название | CMOS micromachined grippers with on-chip optical detection |
| Тип | paper |
| DOI | 10.1088/0960-1317/17/3/009 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 17 |
| Первая страница | 482 |
| Последняя страница | 488 |
| Последняя страница | 488 |
| Аффилиация | Lu, Michael S-C; Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan, Republic of China; Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, Taiwan, Republic of China; Institute of Microelectromechanical Systems, National Tsing Hua University, Hsinchu, Taiwan, Republic of China |
| Аффилиация | Wu, Zhong-Hong; Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, Taiwan, Republic of China |
| Аффилиация | Huang, Chia-En; Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, Taiwan, Republic of China |
| Аффилиация | Hung, Shi-Jie; Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, Taiwan, Republic of China |
| Аффилиация | Chen, Meng-Huei; Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, Taiwan, Republic of China |
| Аффилиация | King, Ya-Chin; Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan, Republic of China; Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, Taiwan, Republic of China |
| Выпуск | 3 |
