| Автор | Onoe, Hiroaki |
| Автор | Iwase, Eiji |
| Автор | Matsumoto, Kiyoshi |
| Автор | Shimoyama, Isao |
| Дата выпуска | 2007-09-01 |
| dc.description | We propose a method of integrating heterogeneous silicon microstructures (typical scale of 10–100 µm) into a single silicon substrate to fabricate MEMS structures. It includes adhesion-based liftoff and stamping transfer (LIST) processes using poly-(dimethylsiloxane) (PDMS) sheets. Silicon microstructures fabricated on different wafers are lifted onto the PDMS sheets by breaking the narrow columns supporting the microstructures by applying a vertical load to the PDMS sheet, and then transferred onto the silicon substrate with high yield (more than 90%) and superior positioning accuracy (within 0.3 µm on average in a 2 × 3 mm area). Multiple heterogeneous silicon structures are integrated into a single silicon substrate by repeating this LIST process. We fabricated two-dimensional arrays, three-dimensional pyramidal structures and overhanging bridge microstructures with our method, which proved that the LIST process could be used to integrate heterogeneous MEMS structures into a single wafer. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2007 IOP Publishing Ltd |
| Название | Three-dimensional integration of heterogeneous silicon micro-structures by liftoff and stamping transfer |
| Тип | paper |
| DOI | 10.1088/0960-1317/17/9/010 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 17 |
| Первая страница | 1818 |
| Последняя страница | 1827 |
| Последняя страница | 1827 |
| Аффилиация | Onoe, Hiroaki; Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, Japan |
| Аффилиация | Iwase, Eiji; Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, Japan |
| Аффилиация | Matsumoto, Kiyoshi; Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, Japan |
| Аффилиация | Shimoyama, Isao; Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, Japan |
| Выпуск | 9 |
