| Автор | Sarajlic, Edin |
| Автор | Yamahata, Christophe |
| Автор | Cordero, Mauricio |
| Автор | Collard, Dominique |
| Автор | Fujita, Hiroyuki |
| Дата выпуска | 2008-07-01 |
| dc.description | We report a simple bulk micromachining method for the fabrication of high aspect ratio monocrystalline silicon MEMS (microelectromechanical systems) in a standard silicon wafer. We call this two-mask microfabrication process high aspect ratio etching and metallization or HAREM: it combines double-side etching and metallization to create suspended micromechanical structures with electrically ‘insulating walls’ on their backside. The insulating walls ensure a proper electrical insulation between the different actuation and sensing elements situated on either fixed or movable parts of the device. To demonstrate the high potential of this simple microfabrication method, we have designed and characterized electrostatically actuated microtweezers that integrate a differential capacitive sensor. The prototype showed an electrical insulation better than 1 GΩ between the different elements of the device. Furthermore, using a lock-in amplifier circuit, we could measure the position of the moving probe with few nanometers resolution for a displacement range of about 3 µm. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2008 IOP Publishing Ltd |
| Название | HAREM: high aspect ratio etching and metallization for microsystems fabricationThis work was presented in part at the 21st IEEE MEMS Conference (Tucson, AZ, USA, 13–17 January, 2008) (doi:10.1109/MEMSYS.2008.4443656). |
| Тип | paper |
| DOI | 10.1088/0960-1317/18/7/075008 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 18 |
| Первая страница | 75008 |
| Последняя страница | 75015 |
| Аффилиация | Sarajlic, Edin; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan |
| Аффилиация | Yamahata, Christophe; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan |
| Аффилиация | Cordero, Mauricio; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan |
| Аффилиация | Collard, Dominique; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan; Laboratory for Integrated Micro Mechatronic Systems (LIMMS/CNRS-IIS UMI 2820), Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan |
| Аффилиация | Fujita, Hiroyuki; Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan |
| Выпуск | 7 |
