| Автор | Subramani, Balasubramanian Ganapathy |
| Автор | Selvaganapathy, Ponnambalam Ravi |
| Дата выпуска | 2009-01-01 |
| dc.description | PDMS is a widely used material for construction of microfluidic devices. The traditional PDMS microfabrication process, although versatile, cannot be used to form microfluidic devices with embedded tall topological features, such as thick-film electrodes and porous reactor beds. This paper presents an elegant surface micromachining process for microfluidic devices that allows complete leak-proof sealing and a conformal contact of the PDMS with tall pre-existing topographical features and demonstrates this approach by embedding 6 µm thick Ag/AgCl (high capacity 1680 µA s) electrodes inside the microchannels. In this process, thin spin-cast films of the PDMS are used as the structural material and a photoresist is used as the sacrificial material. A crucial parameter, namely adhesion of the spun-cast structural layer to the substrate, was characterized for different pre-polymer ratios using a standard tensile test, and a 1:3 (curing agent:base) combination was found to be the best with a maximum adhesion strength of 7.2 MPa. The elastic property of the PDMS allowed extremely fast release times of ∼1 min of the fabricated microchannels. The versatility of this process was demonstrated by the fabrication of a pneumatic microvalve with multi-layered microchannel geometry. The valve closure occurred at 6.37 kPa. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2009 IOP Publishing Ltd |
| Название | Surface micromachined PDMS microfluidic devices fabricated using a sacrificial photoresistPreliminary results of this paper have been presented at the Canadian Workshop on MEMS and Microfluidics, Montréal, Canada, August 2007. |
| Тип | paper |
| DOI | 10.1088/0960-1317/19/1/015013 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 19 |
| Первая страница | 15013 |
| Последняя страница | 15022 |
| Аффилиация | Selvaganapathy, Ponnambalam Ravi; |
| Аффилиация | Subramani, Balasubramanian Ganapathy; Department of Mechanical Engineering, McMaster University, 212/B JHE, 1280 Main St West, Hamilton, ON L8S 4N2, Canada |
| Выпуск | 1 |
