| Автор | Broue, Adrien |
| Автор | Fourcade, Thibaut |
| Автор | Dhennin, Jérémie |
| Автор | Courtade, Frédéric |
| Автор | Charvet, Pierre–Louis |
| Автор | Pons, Patrick |
| Автор | Lafontan, Xavier |
| Автор | Plana, Robert |
| Дата выпуска | 2010-08-01 |
| dc.description | Research on contact characterization for microelectromechanical system (MEMS) switches has been driven by the necessity to reach a high-reliability level for micro-switch applications. One of the main failures observed during cycling of the devices is the increase of the electrical contact resistance. The key issue is the electromechanical behaviour of the materials used at the contact interface where the current flows through. Metal contact switches have a large and complex set of failure mechanisms according to the current level. This paper demonstrates the validity of a new methodology using a commercial nanoindenter coupled with electrical measurements on test vehicles specially designed to investigate the micro-scale contact physics. Dedicated validation tests and modelling are performed to assess the introduced methodology by analyzing the gold contact interface with 5 µm<sup>2</sup> square bumps at various current levels. Contact temperature rise is measured, which affects the mechanical properties of the contact materials and modifies the contact topology. In addition, the data provide a better understanding of micro-contact behaviour related to the impact of current at low- to medium-power levels. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2010 IOP Publishing Ltd |
| Название | Validation of bending tests by nanoindentation for micro-contact analysis of MEMS switchesThis article was originally submitted for the special section ‘Selected papers from the 20th Micromechanics Europe Workshop (MME 09) (Toulouse, France, 20–22 September 2009)’, Journal of Micromechanics and Microengineering, volume 20, issue 6. |
| Тип | paper |
| DOI | 10.1088/0960-1317/20/8/085025 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 20 |
| Первая страница | 85025 |
| Последняя страница | 85032 |
| Аффилиация | Broue, Adrien; NovaMEMS, c/o CNES 18 Avenue E. Belin 31401 Toulouse cedex 9, France; CNRS, LAAS, 7 avenue du colonel Roche, F-31077 Toulouse, France; Université de Toulouse, UPS, INSA, INP, ISAE, LAAS, F-31077 Toulouse, France |
| Аффилиация | Fourcade, Thibaut; NovaMEMS, c/o CNES 18 Avenue E. Belin 31401 Toulouse cedex 9, France; LGP-ENIT, 47 Av. d'Azereix, BP 1629, 65016 Tarbes CEDEX, France |
| Аффилиация | Dhennin, Jérémie; NovaMEMS, c/o CNES 18 Avenue E. Belin 31401 Toulouse cedex 9, France |
| Аффилиация | Courtade, Frédéric; CNES, 18 Avenue E. Belin 31401 Toulouse, France |
| Аффилиация | Charvet, Pierre–Louis; CEA-LETI, Minatec, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France |
| Аффилиация | Pons, Patrick; CNRS, LAAS, 7 avenue du colonel Roche, F-31077 Toulouse, France; Université de Toulouse, UPS, INSA, INP, ISAE, LAAS, F-31077 Toulouse, France |
| Аффилиация | Lafontan, Xavier; INTESENS, 10 Avenue de l'Europe 31520 Ramonville, France |
| Аффилиация | Plana, Robert; CNRS, LAAS, 7 avenue du colonel Roche, F-31077 Toulouse, France; Université de Toulouse, UPS, INSA, INP, ISAE, LAAS, F-31077 Toulouse, France |
| Выпуск | 8 |
