| Автор | Izadi, N |
| Автор | de Boer, M J |
| Автор | Berenschot, J W |
| Автор | Krijnen, G J M |
| Дата выпуска | 2010-08-01 |
| dc.description | A fabrication process is presented which allows realizing the dense arrays of fully supported flexible SU-8 membranes with integrated electrodes underneath that support cylindrical hair-like structures on the top. Electrodes have been insulated from liquid to prevent short circuit or electrolysis. The process allows a controllable distance between counter electrodes. The excess squeeze film damping is eliminated with a closed membrane configuration with backside openings. A low-power differential capacitive measurement mechanism is employed as a sensor readout. These flow sensors provide a distributed sensing mechanism inspired by the superficial neuromast as found in the lateral line system of fish. This paper focuses on the fabrication of the sensors with preliminary mechanical results demonstrating the functionality of the fabricated devices. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2010 IOP Publishing Ltd |
| Название | Fabrication of superficial neuromast inspired capacitive flow sensorsThis paper is an extension of Izadi et al, ‘Fabrication of dense flow sensor arrays on flexible membranes’ presented at IEEE Transducer 2009, Denver, Colorado. |
| Тип | paper |
| DOI | 10.1088/0960-1317/20/8/085041 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 20 |
| Первая страница | 85041 |
| Последняя страница | 85049 |
| Аффилиация | Izadi, N; Transducers Science and Technology Group, MESA + Research Institute, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands |
| Аффилиация | de Boer, M J; Transducers Science and Technology Group, MESA + Research Institute, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands |
| Аффилиация | Berenschot, J W; Transducers Science and Technology Group, MESA + Research Institute, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands |
| Аффилиация | Krijnen, G J M; Transducers Science and Technology Group, MESA + Research Institute, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands |
| Выпуск | 8 |
