| Автор | T Gans |
| Автор | V Schulz-von der Gathen |
| Автор | H F Döbele |
| Дата выпуска | 2001-02-01 |
| dc.description | We report on time-dependent population distributions of excited rotational states of hydrogen in a capacitively coupled RF discharge. The common model to obtain the gas temperature from the rotational distribution is not applicable at all times during the discharge cycle due to the time dependence of the EEDF. The apparent temperature within a cycle assumes values between 350 K and 450 K for the discharge parameters of this experiment. We discuss the optimum time window within the discharge cycle that yields the best approximation to the actual temperature. Erroneous results can be obtained, in principle, with time-integrated measurements; we find, however, that in the present case the systematic error amounts to only approximately 20 K. This is due to the fact that the dominant contribution to the average intensity arises during that time window for which the assumptions underlying the analysis are best fulfilled. A similar analysis can be performed for N<sup>+</sup><sub>2</sub> rotational bands with a small amount of nitrogen added to the discharge gas. These populations do not exhibit the time variations found in the case of H<sub>2</sub>. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Time dependence of rotational state populations of excited hydrogen molecules in an RF excited plasma reactor |
| Тип | paper |
| DOI | 10.1088/0963-0252/10/1/303 |
| Electronic ISSN | 1361-6595 |
| Print ISSN | 0963-0252 |
| Журнал | Plasma Sources Science and Technology |
| Том | 10 |
| Первая страница | 17 |
| Последняя страница | 23 |
| Аффилиация | T Gans; Institut für Laser- und Plasmaphysik, Universität GH Essen, 45117 Essen, Germany |
| Аффилиация | V Schulz-von der Gathen; Institut für Laser- und Plasmaphysik, Universität GH Essen, 45117 Essen, Germany |
| Аффилиация | H F Döbele; Institut für Laser- und Plasmaphysik, Universität GH Essen, 45117 Essen, Germany |
| Выпуск | 1 |
