| Автор | Francis F Chen |
| Автор | John D Evans |
| Автор | George R Tynan |
| Дата выпуска | 2001-05-01 |
| dc.description | Helicon plasma sources are known to be efficient generators of high-density plasma for materials processing applications. By using multiple sources, arbitrarily large substrates can in principle be covered uniformly with dense plasma. To test this idea, a seven-tube helicon source was constructed, and the plasma density and uniformity measured. Densities up to 10<sup>12</sup> cm<sup>-3</sup> over a 40 cm diameter area with ±3% uniformity were achieved. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Design and performance of distributed helicon sources |
| Тип | paper |
| DOI | 10.1088/0963-0252/10/2/313 |
| Electronic ISSN | 1361-6595 |
| Print ISSN | 0963-0252 |
| Журнал | Plasma Sources Science and Technology |
| Том | 10 |
| Первая страница | 236 |
| Последняя страница | 249 |
| Выпуск | 2 |
