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Автор X R Duan
Автор H Lange
Автор A Meyer-Plath
Дата выпуска 2003-11-01
dc.description Absolute number densities and the spatial distribution of atomic hydrogen in a large-scale microwave plasma reactor were measured by means of two-photon absorption laser-induced fluorescence (LIF) with laser radiation at 205 nm. The microwave discharge was operated at 2.45 GHz with a maximum power of 2 kW. Absolute number densities were obtained by calibrating the LIF detection system via NO<sub>2</sub> titration in a flow tube reactor and in the range from 0.5×10<sup>15</sup> to 2.5×10<sup>15</sup> cm<sup>−3</sup>. Compared to small-scale reactors with a volume-to-surface ratio less than 3 cm, this reactor has a relatively homogeneous spatial distribution of atomic hydrogen. The mole fraction of atomic hydrogen in hydrogen plasmas ranges from 10 to 20. The gas temperature–volume effect plays an important role in the spatial distribution of atomic hydrogen in this reactor.
Формат application.pdf
Издатель Institute of Physics Publishing
Название Absolute density distribution of H atoms in a large-scale microwave plasma reactor
Тип paper
DOI 10.1088/0963-0252/12/4/307
Electronic ISSN 1361-6595
Print ISSN 0963-0252
Журнал Plasma Sources Science and Technology
Том 12
Первая страница 554
Последняя страница 560
Аффилиация X R Duan; Institut für Niedertemperatur-Plasmaphysik, 17489 Greifswald, Germany
Аффилиация H Lange; Institut für Niedertemperatur-Plasmaphysik, 17489 Greifswald, Germany
Аффилиация A Meyer-Plath; Institut für Niedertemperatur-Plasmaphysik, 17489 Greifswald, Germany
Выпуск 4

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