A compact three-electrode discharge system for long-pulse KrCl excimer lasers
Casper, L C; Bastiaens, H M J; Peters, P J M; Boller, K-J; Hofstra, R M; Casper, L C; Faculty of Science and Technology, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands; Bastiaens, H M J; Faculty of Science and Technology, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands; Peters, P J M; Faculty of Science and Technology, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands; Boller, K-J; Faculty of Science and Technology, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands; Hofstra, R M; Nederlands Centrum voor Laser Research (NCLR) B.V., PO Box 2662, 7500 CR Enschede, The Netherlands
Журнал:
Plasma Sources Science and Technology
Дата:
2008-02-01
Аннотация:
Spatially very homogeneous gas discharges with long-pulse duration have been realized in HCl-based rare-gas halide gas mixtures at over-atmospheric pressures. A low inductive three-electrode prepulse–mainpulse configuration with two discharge volumes has been used as excitation circuit. The energy transfer efficiency of the pump circuit is very high and reaches 87%. Furthermore, the rise time of the discharge current is very short, in order to improve the discharge stability for high pump powers. Experiments in Xe/HCl/Ne mixtures reveal spatially very homogeneous discharges for up to 370 ns (FWHM) with a power deposition of 260 kW cm<sup>−3</sup>. For discharges in Kr/HCl/Ne mixtures, we also observe very homogeneous discharges for pump power densities of more than 500 kW cm<sup>−3</sup>. Discharges in mixtures with a krypton concentration of 100 mbar and 0.5 mbar HCl are homogeneous for 300 ns against 200 ns when 1 mbar of HCl is used.
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