| Автор | Baby, A |
| Автор | Mahony, C M O |
| Автор | Maguire, P D |
| Дата выпуска | 2011-02-01 |
| dc.description | We report, for the first time, quadrupole mass spectrometry of neutral and positive ionic hydrocarbon species measured at the rf-biased substrate electrode of an inductively coupled plasma for acetylene rich C<sub>2</sub>H<sub>2</sub> : Ar mixtures under various bias, frequency and pressure conditions. It has been observed that, irrespective of initial gas mixture, the resultant plasma is dominated by argon neutrals and ions. This is attributed to highly efficient conversion of acetylene to C<sub>2</sub>H due to the enhanced electron density compared with a standard capacitive plasma where the acetylene (neutral and ion) species remain dominant. This conversion may be crucial to film formation via inert rather than hydrocarbon ion bombardment. In addition, the transient formation of CH<sub>4</sub> from acetylene has been discovered using IR absorption spectroscopy with time constants similar to observed pressure variations. Rate coefficients and rates for many of the reaction mechanisms, calculated using measured electron energy distribution functions and species densities, are given. These results have important application in plasma models and growth studies for hydrogenated amorphous or diamond-like carbon film deposition. Film growth under similar plasma conditions is reported in an associated paper along with ion energy distributions for important growth species. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2011 IOP Publishing Ltd |
| Название | Acetylene–argon plasmas measured at a biased substrate electrode for diamond-like carbon deposition: I. Mass spectrometry This paper was presented as an invited talk at the 19th European Sectional Conference on Atomic and Molecular Physics of Ionized Gases, Granada, Spain, 15–19 July 2008. See stacks.iop.org/PSST/18/3. |
| Тип | paper |
| DOI | 10.1088/0963-0252/20/1/015003 |
| Electronic ISSN | 1361-6595 |
| Print ISSN | 0963-0252 |
| Журнал | Plasma Sources Science and Technology |
| Том | 20 |
| Первая страница | 15003 |
| Последняя страница | 15018 |
| Аффилиация | Baby, A; Nanotechnology and Integrated Bio-Engineering Centre (NIBEC), University of Ulster, Newtownabbey, BT37 0QB, UK |
| Аффилиация | Mahony, C M O; Nanotechnology and Integrated Bio-Engineering Centre (NIBEC), University of Ulster, Newtownabbey, BT37 0QB, UK |
| Аффилиация | Maguire, P D; Nanotechnology and Integrated Bio-Engineering Centre (NIBEC), University of Ulster, Newtownabbey, BT37 0QB, UK |
| Выпуск | 1 |
