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Автор Tamer Akan
Автор Serdar Demirkol
Автор Naci Ekem
Автор Suat Pat
Автор Geavit Musa
Дата выпуска 2007-06-01
dc.description The thermionic vacuum arc (TVA) is a new type of plasma source, which generates a pure metal and ceramic vapour plasma containing ions with a directed energy. TVA discharges can be ignited in high vacuum conditions between a heated cathode (electron gun) and an anode (tungsten crucible) containing the material. The accelerated electron beam, incident on the anode, heats the crucible, together with its contents, to a high temperature. After establishing a steady-state density of the evaporating anode material atoms, and when the voltage applied is high enough, a bright discharge is ignited between the electrodes. We generated silver and Al<sub>2</sub>O<sub>3</sub> TVA discharges in order to compare the metal and ceramic TVA discharges. The electrical and optical characteristics of silver and Al<sub>2</sub>O<sub>3</sub> TVA discharges were analysed. The TVA is also a new technique for the deposition of thin films. The film condenses on the sample from the plasma state of the vapour phase of the anode material, generated by a TVA. We deposited silver and Al<sub>2</sub>O<sub>3</sub> thin films onto an aluminium substrate layer-by-layer using their TVA discharges, and produced micro and/or nano-layer Ag-Al<sub>2</sub>O<sub>3</sub> composite samples. The composite samples using scanning electron microscopy was also analysed.
Формат application.pdf
Издатель Institute of Physics Publishing
Название Study of Metal and Ceramic Thermionic Vacuum arc Discharges
Тип paper
DOI 10.1088/1009-0630/9/3/06
Electronic ISSN 2058-6272
Print ISSN 1009-0630
Журнал Plasma Science and Technology
Том 9
Первая страница 280
Последняя страница 283
Выпуск 3

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