Автор |
Burger, Sofie |
Автор |
Eberl, Christoph |
Автор |
Siegel, Alexander |
Автор |
Ludwig, Alfred |
Автор |
Kraft, Oliver |
Дата выпуска |
2011-10-01 |
dc.description |
Thin films are used in a wide variety of computing and communication applications although their fatigue behavior and its dependence on alloying elements are not very well known. In this paper, we present an experimental implementation of a novel high-throughput fatigue testing method for metallic thin films. The methodology uses the fact that the surface strain amplitude of a vibrating cantilever decreases linearly from the fixed end to the free end. Therefore, a thin film attached to a vibrating cantilever will experience a gradient of strain and corresponding stress amplitudes along the cantilever. Each cantilever can be used to extract a lifetime diagram by measuring the fatigue-induced damage front that progresses along the cantilever during up to 10<sup>8</sup> load cycles. |
Формат |
application.pdf |
Издатель |
Institute of Physics Publishing |
Копирайт |
2011 National Institute for Materials Science |
Название |
A novel high-throughput fatigue testing method for metallic thin films |
Тип |
paper |
DOI |
10.1088/1468-6996/12/5/054202 |
Electronic ISSN |
1878-5514 |
Print ISSN |
1468-6996 |
Журнал |
Science and Technology of Advanced Materials |
Том |
12 |
Первая страница |
54202 |
Последняя страница |
54208 |
Аффилиация |
Burger, Sofie; Institute for Applied Materials, Karlsruhe Institute of Technology (KIT), Kaiserstr 12, 76131 Karlsruhe, Germany |
Аффилиация |
Eberl, Christoph; Institute for Applied Materials, Karlsruhe Institute of Technology (KIT), Kaiserstr 12, 76131 Karlsruhe, Germany |
Аффилиация |
Siegel, Alexander; Ruhr-Universität Bochum, Institut für Werkstoffe/Werkstoffe der Mikrotechnik, 44780 Bochum, Germany |
Аффилиация |
Ludwig, Alfred; Ruhr-Universität Bochum, Institut für Werkstoffe/Werkstoffe der Mikrotechnik, 44780 Bochum, Germany |
Аффилиация |
Kraft, Oliver; Institute for Applied Materials, Karlsruhe Institute of Technology (KIT), Kaiserstr 12, 76131 Karlsruhe, Germany |
Выпуск |
5 |