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Автор Burger, Sofie
Автор Eberl, Christoph
Автор Siegel, Alexander
Автор Ludwig, Alfred
Автор Kraft, Oliver
Дата выпуска 2011-10-01
dc.description Thin films are used in a wide variety of computing and communication applications although their fatigue behavior and its dependence on alloying elements are not very well known. In this paper, we present an experimental implementation of a novel high-throughput fatigue testing method for metallic thin films. The methodology uses the fact that the surface strain amplitude of a vibrating cantilever decreases linearly from the fixed end to the free end. Therefore, a thin film attached to a vibrating cantilever will experience a gradient of strain and corresponding stress amplitudes along the cantilever. Each cantilever can be used to extract a lifetime diagram by measuring the fatigue-induced damage front that progresses along the cantilever during up to 10<sup>8</sup> load cycles.
Формат application.pdf
Издатель Institute of Physics Publishing
Копирайт 2011 National Institute for Materials Science
Название A novel high-throughput fatigue testing method for metallic thin films
Тип paper
DOI 10.1088/1468-6996/12/5/054202
Electronic ISSN 1878-5514
Print ISSN 1468-6996
Журнал Science and Technology of Advanced Materials
Том 12
Первая страница 54202
Последняя страница 54208
Аффилиация Burger, Sofie; Institute for Applied Materials, Karlsruhe Institute of Technology (KIT), Kaiserstr 12, 76131 Karlsruhe, Germany
Аффилиация Eberl, Christoph; Institute for Applied Materials, Karlsruhe Institute of Technology (KIT), Kaiserstr 12, 76131 Karlsruhe, Germany
Аффилиация Siegel, Alexander; Ruhr-Universität Bochum, Institut für Werkstoffe/Werkstoffe der Mikrotechnik, 44780 Bochum, Germany
Аффилиация Ludwig, Alfred; Ruhr-Universität Bochum, Institut für Werkstoffe/Werkstoffe der Mikrotechnik, 44780 Bochum, Germany
Аффилиация Kraft, Oliver; Institute for Applied Materials, Karlsruhe Institute of Technology (KIT), Kaiserstr 12, 76131 Karlsruhe, Germany
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