| Автор | Ikeda, R. |
| Автор | Uchiyama, T. |
| Автор | Cho, H. |
| Автор | Ogawa, T. |
| Автор | Takemoto, M. |
| Дата выпуска | 2006-01-31 |
| dc.description | Residual stress of thin diamond films deposited by chemical vapor deposition (CVD) method was measured using a new method for residual stress measurement we developed. Compressive residual stresses of CVD diamond films were determined from the height and diameter of protuberance of film delaminated by pulse laser spallation technique. We produced the protuberance with different diameter and height by changing the laser energy. Compressive stresses were calculated from the momentum balance of atmospheric pressure and internal compressive force of the film. The residual stress of the well-faceted diamond film was measured as −338±22 MPa and agreed well with the stress (−348±17 MPa) measured by the X-ray diffraction method. In three other polycrystalline diamond films with different grain structure, the compressive stresses decreased from 300 to 147 MPa with decreasing the grain size from a few microns to tens of nanometers. Small compressive stresses of fine grain films are correlated with the grain boundary structure according to visible Raman spectra study conducted. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | © 2005 Elsevier Ltd |
| Название | An advanced method for measuring the residual stress of deposited film utilizing laser spallation technique |
| Тип | paper |
| DOI | 10.1016/j.stam.2005.11.008 |
| Electronic ISSN | 1878-5514 |
| Print ISSN | 1468-6996 |
| Журнал | Science and Technology of Advanced Materials |
| Том | 7 |
| Первая страница | 90 |
| Последняя страница | 96 |
| Аффилиация | Ikeda, R.; Research and Development, Asahi Diamond Industrial Co., Ltd, 787 Tabi, Ichihara, Chiba 290-0515, Japan; |
| Аффилиация | Uchiyama, T.; College of Science and Engineering, Aoyama Gakuin University, 5-10-1 Huchinobe, Sagamihara, Kanagawa 229-8558, Japan |
| Аффилиация | Cho, H.; College of Science and Engineering, Aoyama Gakuin University, 5-10-1 Huchinobe, Sagamihara, Kanagawa 229-8558, Japan |
| Аффилиация | Ogawa, T.; College of Science and Engineering, Aoyama Gakuin University, 5-10-1 Huchinobe, Sagamihara, Kanagawa 229-8558, Japan |
| Аффилиация | Takemoto, M.; College of Science and Engineering, Aoyama Gakuin University, 5-10-1 Huchinobe, Sagamihara, Kanagawa 229-8558, Japan |
| Выпуск | 1 |
