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Автор Jie Xiong
Автор Bowan Tao
Автор Wenfeng Qin
Автор Xiao Feng
Автор Xiaoke Song
Автор Fei Zhang
Автор Yanrong Li
Дата выпуска 2009-03-01
dc.description In this paper, a study regarding the epitaxial growth of Ce<sub>x</sub>Zr<sub>1-x</sub>O<sub>2</sub> film on biaxially textured Ni-5at.%W substrate and its use as a single buffer layer of a YBCO coated conductors was reported. Films of Ce-Zr mixed oxide were prepared by direct-current (d.c.) reactive magnetron sputtering with the two sputtering guns arranged symmetrically with respect to the substrate. In sputtering process, d.c. power of Zr was fixed in 200 W while that of Ce was varied with 30 W, 50 W, 75 W, and 100 W, respectively. It was confirmed that the composition of the films could be controlled with modulating power of Ce target. All samples exhibited good epitaxial growth with c-axis perpendicular to the substrate surface. Atomic force microscope revealed a continuous, dense, and crack-free surface morphology for Ce<sub>0.32</sub>Zr<sub>0.68</sub>O<sub>2</sub> thin films, which provided themselves as the good single buffer to the YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub> (YBCO) coated conductors. High quality Ce<sub>0.32</sub>Zr<sub>0.68</sub>O<sub>2</sub> buffer layers up to 100-m length could be fabricated with production speed of about 1.2m/h. X-ray scans have been performed as a function of length to determine the crystallographic consistency of the epitaxial Ce<sub>0.32</sub>Zr<sub>0.68</sub>O<sub>2</sub> over length.
Формат application.pdf
Издатель Institute of Physics Publishing
Копирайт © 2009 IOP Publishing Ltd
Название Reel-to-reel continuous deposition of Ce<sub>x</sub>Zr<sub>1-x</sub>O<sub>2</sub> single buffer layer for YBCO coated conductors
Тип paper
DOI 10.1088/1742-6596/153/1/012036
Electronic ISSN 1742-6596
Print ISSN 1742-6588
Журнал Journal of Physics: Conference Series
Том 153
Первая страница 12036
Последняя страница 12044
Аффилиация Jie Xiong; State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, Republic of China
Аффилиация Bowan Tao; State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, Republic of China
Аффилиация Wenfeng Qin; State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, Republic of China
Аффилиация Xiao Feng; State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, Republic of China
Аффилиация Xiaoke Song; State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, Republic of China
Аффилиация Fei Zhang; State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, Republic of China
Аффилиация Yanrong Li; State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, Republic of China
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