(001)-orientation of anatase TiO<sub>2</sub> thin films on RbLaNb<sub>2</sub>O<sub>7</sub> seed layer prepared by ELAMOD
Nakajima, Tomohiko; Tsuchiya, Tetsuo; Kumagai, Toshiya; Nakajima, Tomohiko;; Tsuchiya, Tetsuo; National Institute of Advanced Industrial Science and Technology, Advanced Manufacturing Reserch Institute, Flexible Chemical Coating Group, Tsukuba Central 5, Higashi 1-1-1, Tsukuba, Ibaraki, 305-8565, Japan; Kumagai, Toshiya; National Institute of Advanced Industrial Science and Technology, Advanced Manufacturing Reserch Institute, Flexible Chemical Coating Group, Tsukuba Central 5, Higashi 1-1-1, Tsukuba, Ibaraki, 305-8565, Japan
Журнал:
IOP Conference Series: Materials Science and Engineering
Дата:
2011-10-29
Аннотация:
By means of a metal-organic deposition process, the anatase TiO<sub>2</sub> thin films with and without (010)-oriented RbLaNb<sub>2</sub>O<sub>7</sub> seed layer prepared by an excimer laser assisted metal-organic deposition process were crystallized on silica glass substrates. The anatase TiO<sub>2</sub> thin film on the substrate with the seed layer showed high (001)-orientation because of the small lattice mismatch between the (001)-TiO<sub>2</sub> and (010)-RbLaNb<sub>2</sub>O<sub>7</sub> planes, while the anatase TiO<sub>2</sub> thin film without the seed layer was crystallized without any specific orientations. The Lotgering factor F(001) of the obtained (001)-oriented anatase TiO<sub>2</sub> thin film was evaluated to be about 0.92. The (001)-orientation degree seems to be further improved by some surface modifications of the seed layer to stimulate the chemical bonding for the edge shared TiO<sub>6</sub> octahedra along the c-axis.
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