Direct patterning on reduced graphene oxide nanosheets using femtosecond laser pulses
Liu, Zhi-Bo; Li, Li; Xu, Yan-Fei; Liang, Jia-Jie; Zhao, Xin; Chen, Shu-Qi; Chen, Yong-Sheng; Tian, Jian-Guo; Liu, Zhi-Bo; The Key Laboratory of Weak Light Nonlinear Photonics, Ministry of Education, Teda Applied Physics School, and School of Physics, Nankai University, Tianjin 300071, People’s Republic of China; Li, Li; The Key Laboratory of Weak Light Nonlinear Photonics, Ministry of Education, Teda Applied Physics School, and School of Physics, Nankai University, Tianjin 300071, People’s Republic of China; Xu, Yan-Fei; The Key Laboratory of Functional Polymer Materials and Center for Nanoscale Science and Technology, Institute of Polymer Chemistry, College of Chemistry, Nankai University, Tianjin 300071, People’s Republic of China; Liang, Jia-Jie; The Key Laboratory of Functional Polymer Materials and Center for Nanoscale Science and Technology, Institute of Polymer Chemistry, College of Chemistry, Nankai University, Tianjin 300071, People’s Republic of China; Zhao, Xin; The Key Laboratory of Weak Light Nonlinear Photonics, Ministry of Education, Teda Applied Physics School, and School of Physics, Nankai University, Tianjin 300071, People’s Republic of China; Chen, Shu-Qi; The Key Laboratory of Weak Light Nonlinear Photonics, Ministry of Education, Teda Applied Physics School, and School of Physics, Nankai University, Tianjin 300071, People’s Republic of China; Chen, Yong-Sheng; The Key Laboratory of Functional Polymer Materials and Center for Nanoscale Science and Technology, Institute of Polymer Chemistry, College of Chemistry, Nankai University, Tianjin 300071, People’s Republic of China; Tian, Jian-Guo; The Key Laboratory of Weak Light Nonlinear Photonics, Ministry of Education, Teda Applied Physics School, and School of Physics, Nankai University, Tianjin 300071, People’s Republic of China
Журнал:
Journal of Optics
Дата:
2011-08-01
Аннотация:
Micro- and nanostructures were fabricated directly on graphene nanosheets by controlling the conditions of femtosecond laser pulse etching. High quality graphene micro- and nanostructures with a minimum width of 492 nm were obtained as the graphene nanosheets used in our experiments were large-scale, uniform and highly conductive. Various complex patterns were successfully created through femtosecond laser etching. Furthermore, by managing the laser energy, the graphene under the Au electrodes could be completely or partly removed. This technology of direct patterning of micro- and nanostructures on graphene through femtosecond laser technology might pave the way for the integration of graphene-based electronic microdevices.
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