| Автор | Tong, Duy Hien |
| Автор | Tran, Phu Duy |
| Автор | Tung Pham, Xuan Thanh |
| Автор | Pham, Van Binh |
| Автор | Tuyen Le, Thi Thanh |
| Автор | Dang, Mau Chien |
| Автор | J M Van Rijn, Cees |
| Дата выпуска | 2010-03-01 |
| dc.description | In this paper we present an innovative method, deposition and etching under angles (DEA), for the fabrication of ready-for-measurement platinum (Pt) nanowires at the wafer-scale. The presented fabrication approach utilizes common techniques of conventional microfabrication technology, such as microlithography, thin-film deposition and wafer-scale ion beam etching, to realize an array of Pt nanowires on a silicon substrate with an insulation layer of silicon dioxide. Well-defined nanowire arrays with wire width down to 30 nm and wire length of up to several millimeters have been realized. Furthermore, each Pt nanowire from the array is individually electrically addressable, for multiplex detection. To prove the potential applications of the fabricated Pt nanowire chips, utilization of the fabricated Pt nanowire chip in glucose detection is presented and discussed. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2010 Vietnam Academy of Science & Technology |
| Название | The nanofabrication of Pt nanowire arrays at the wafer-scale and its application in glucose detection |
| Тип | paper |
| DOI | 10.1088/2043-6254/1/1/015011 |
| Electronic ISSN | 2043-6262 |
| Print ISSN | 2043-6254 |
| Журнал | Advances in Natural Sciences: Nanoscience and Nanotechnology |
| Том | 1 |
| Первая страница | 15011 |
| Последняя страница | 15014 |
| Аффилиация | Tong, Duy Hien; Laboratory for Nanotechnology, Vietnam National University, Community 6, Linh Trung Ward, Thu Duc District, Ho Chi Minh City, Vietnam; Nanosens Research B.V., Berkelkade 11, NL 7201 JE Zutphen, The Netherlands |
| Аффилиация | Tran, Phu Duy; Laboratory for Nanotechnology, Vietnam National University, Community 6, Linh Trung Ward, Thu Duc District, Ho Chi Minh City, Vietnam |
| Аффилиация | Tung Pham, Xuan Thanh; Laboratory for Nanotechnology, Vietnam National University, Community 6, Linh Trung Ward, Thu Duc District, Ho Chi Minh City, Vietnam |
| Аффилиация | Pham, Van Binh; Laboratory for Nanotechnology, Vietnam National University, Community 6, Linh Trung Ward, Thu Duc District, Ho Chi Minh City, Vietnam |
| Аффилиация | Tuyen Le, Thi Thanh; Laboratory for Nanotechnology, Vietnam National University, Community 6, Linh Trung Ward, Thu Duc District, Ho Chi Minh City, Vietnam |
| Аффилиация | Dang, Mau Chien; Laboratory for Nanotechnology, Vietnam National University, Community 6, Linh Trung Ward, Thu Duc District, Ho Chi Minh City, Vietnam |
| Аффилиация | J M Van Rijn, Cees; Nanosens Research B.V., Berkelkade 11, NL 7201 JE Zutphen, The Netherlands; Laboratory of Organic Chemistry, University of Wageningen, The Netherlands |
| Выпуск | 1 |
