| Автор | Tran, Nhan Ai |
| Автор | Tran, Huy Nam |
| Автор | Dang, Mau Chien |
| Автор | Fribourg-Blanc, Eric |
| Дата выпуска | 2010-06-01 |
| dc.description | A process flow using photolithography and sputtering was studied for copper antenna fabrication on thin poly(ethylene terephthalate) (PET) substrate. The lift-off route was chosen for its flexibility at laboratory scale. It was clarified that the cleaning of PET is an important step that necessitates mild oxygen plasma etching. Then copper is sputter deposited after photolithographic definition of the antenna. Care is necessary since PET, as a very flexible substrate, is temperature sensitive. The temperature increase generated by the impact of deposited copper should be maintained below the glass transition temperature of the polymer to avoid detrimental deformation. dc power of 40 to 50 W was found to be the maximum possible sputtering power for commercial PET. It was found that the resistivity of the thin film is below two times the bulk resistivity of copper for a deposition pressure below 4×10<sup>−3</sup> mbar and thickness above 450 nm. These results enable the reliable fabrication of copper RFID UHF antennae on a PET substrate for further testing of new tag designs. The present paper summarizes the effort to test new designs of antennae for RadioFrequency IDentification (RFID) Ultra High Frequency (UHF) tags, for use in various applications (e.g. object tracking and environment monitoring) in Vietnam. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2010 Vietnam Academy of Science & Technology |
| Название | Copper thin film for RFID UHF antenna on flexible substrate |
| Тип | paper |
| DOI | 10.1088/2043-6254/1/2/025016 |
| Electronic ISSN | 2043-6262 |
| Print ISSN | 2043-6254 |
| Журнал | Advances in Natural Sciences: Nanoscience and Nanotechnology |
| Том | 1 |
| Первая страница | 25016 |
| Последняя страница | 25021 |
| Аффилиация | Tran, Nhan Ai; Laboratory for Nanotechnology, Vietnam National University, Ho Chi Minh City, Community 6, Linh Trung Ward, Thu Duc District, Ho Chi Minh City, Vietnam |
| Аффилиация | Tran, Huy Nam; Laboratory for Nanotechnology, Vietnam National University, Ho Chi Minh City, Community 6, Linh Trung Ward, Thu Duc District, Ho Chi Minh City, Vietnam |
| Аффилиация | Dang, Mau Chien; Laboratory for Nanotechnology, Vietnam National University, Ho Chi Minh City, Community 6, Linh Trung Ward, Thu Duc District, Ho Chi Minh City, Vietnam |
| Аффилиация | Fribourg-Blanc, Eric; CEA-LETI-MINATEC, 17, rue des Martyrs, 38054 Grenoble Cedex 9, France |
| Выпуск | 2 |
