Nanostructured optical thin films fabricated by oblique angle deposition
Sobahan, K M A; Park, Yong Jun; Kim, Jin Joo; Shin, You Suk; Kim, Ji Bum; Hwangbo, Chang Kwon; Sobahan, K M A; Department of Physics, Inha University, Incheon, Korea; Park, Yong Jun; Department of Physics, Inha University, Incheon, Korea; Kim, Jin Joo; Department of Physics, Inha University, Incheon, Korea; Shin, You Suk; Department of Physics, Inha University, Incheon, Korea; Kim, Ji Bum; Department of Physics, Inha University, Incheon, Korea; Hwangbo, Chang Kwon; Department of Physics, Inha University, Incheon, Korea
Журнал:
Advances in Natural Sciences: Nanoscience and Nanotechnology
Дата:
2010-12-01
Аннотация:
Oblique angle deposition (OAD) is a sophisticated technique to fabricate engineered nanostructured thin films for next generation optical nanodevices. In this technique, oblique angle deposition and substrate rotation are employed to control the columnar and helical nanostructures of thin films. The films deposited by this technique show the optical anisotropy, the porosity, or the chirality, depending on the controlled morphologies at the nano-scale. In this review paper, the nanostructured optical thin film devices, such as a circular polarization handedness inverter, a linear polarization-discriminatory inverter and the selective coatings on nanopatterns, are fabricated by electron beam evaporation using the OAD technique, and their optical and structural properties as nanooptical devices are described.
892.9Кб