A microcavity based on a porous silicon multilayer
Do, Thuy Chi; Bui, Huy; Nguyen, Thuy Van; Nguyen, The Anh; Nguyen, Thanh Hai; Pham, Van Hoi; Do, Thuy Chi; Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet Street, Cau Giay District, Hanoi, Vietnam; Thai Nguyen University of Education, Luong Ngoc Quyen Street, Thai Nguyen, Vietnam; Bui, Huy; Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet Street, Cau Giay District, Hanoi, Vietnam; Nguyen, Thuy Van; Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet Street, Cau Giay District, Hanoi, Vietnam; Nguyen, The Anh; Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet Street, Cau Giay District, Hanoi, Vietnam; Nguyen, Thanh Hai; Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet Street, Cau Giay District, Hanoi, Vietnam; Pham, Van Hoi; Institute of Materials Science, Vietnam Academy of Science and Technology, 18 Hoang Quoc Viet Street, Cau Giay District, Hanoi, Vietnam
Журнал:
Advances in Natural Sciences: Nanoscience and Nanotechnology
Дата:
2011-09-01
Аннотация:
We present a new result for the wavelength-selective characteristics of a 1D photonic microcavity based on porous silicon. These properties are studied in both experimentation and simulation. The 1D Fabry–Perot cavity is fabricated by the electrochemical etching of a low-resistivity silicon wafer with modulation of applied current densities. The simulation relies on the transfer matrix method (TMM) to design and predict the optical properties of a 1D photonic microcavity as well as the relation between anodization parameters with reflection spectra. The experimental results show that the elaborated porous silicon photonic microcavities have the wavelength-selective property in a controllable range of 550–775 nm. We have grown cavity structures of 20 stacked layers and the line width at full-width half-maximum (FWHM) of the transmission band of cavity is 20 nm, centered at 643.27 nm. Measured spectral characteristics of photonic microcavity agree with the simulation results.
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