A class of low voltage, elastomer–metal ‘wet’ actuators for use in high-density microfluidics
Bansal, Tushar; Chang, Meng-Ping; Maharbiz, Michel M.; BansalBoth of these authors contributed equally to this work. Tushar; Department of Electrical Engineering and Computer Science, University of Michigan; Chang Meng-Ping; Department of Mechanical Engineering, University of Michigan; Maharbiz Michel M.; Department of Electrical Engineering and Computer Science, University of Michigan; Department of Biomedical Engineering, University of Michigan
Журнал:
Lab on a Chip
Дата:
2007
Аннотация:
We report a class of â wetâ MEMS elastomerâ metal electrostatic actuators which can actuate in air, oil or water environments with no external fluidic connections, has actuation voltages lower than 15 V and is compatible with widespread PDMS microfluidics.
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