An infrared pneumatic detector made by micromachining technology
J -B Chevrier; K Baert; T Slater; J -B Chevrier; IMEC, Heverlee, Belgium; K Baert; IMEC, Heverlee, Belgium; T Slater; IMEC, Heverlee, Belgium
Журнал:
Journal of Micromechanics and Microengineering
Дата:
1995-06-01
Аннотация:
We present a micromachined infrared IR detector based on the principle of the Golay cell. The detector basically consists of a sealed cavity, in which the heat generated by absorbed in light results in an increased gas pressure. This pressure rise is detected capacitively. The theoretical responsivity and noise equivalent of a micromachined device are calculated, and it is shown that a detectivity of 3.6*10<sup>9</sup> cm Hz<sup>1/2</sup> W<sup>-1</sup> can be expected for a 1 mm<sup>2</sup> micromachined version. Further, we propose the use of a micromachined pneumatic gas leak in order to avoid thermal drift. A prototype was fabricated using Si and Pyrex micromachining techniques, and confirmed the principle of operation. The preliminary experimental results are compared to theory.
199.4Кб