| Автор | J -B Chevrier |
| Автор | K Baert |
| Автор | T Slater |
| Дата выпуска | 1995-06-01 |
| dc.description | We present a micromachined infrared IR detector based on the principle of the Golay cell. The detector basically consists of a sealed cavity, in which the heat generated by absorbed in light results in an increased gas pressure. This pressure rise is detected capacitively. The theoretical responsivity and noise equivalent of a micromachined device are calculated, and it is shown that a detectivity of 3.6*10<sup>9</sup> cm Hz<sup>1/2</sup> W<sup>-1</sup> can be expected for a 1 mm<sup>2</sup> micromachined version. Further, we propose the use of a micromachined pneumatic gas leak in order to avoid thermal drift. A prototype was fabricated using Si and Pyrex micromachining techniques, and confirmed the principle of operation. The preliminary experimental results are compared to theory. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | An infrared pneumatic detector made by micromachining technology |
| Тип | paper |
| DOI | 10.1088/0960-1317/5/2/037 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 5 |
| Первая страница | 193 |
| Последняя страница | 195 |
| Аффилиация | J -B Chevrier; IMEC, Heverlee, Belgium |
| Аффилиация | K Baert; IMEC, Heverlee, Belgium |
| Аффилиация | T Slater; IMEC, Heverlee, Belgium |
| Выпуск | 2 |
