Corrugated silicon nitride membranes as suspensions in micromachined silicon accelerometers
Daniel Lapadatu; Andrzej Pyka; Jan Dziuban; Robert Puers
Журнал:
Journal of Micromechanics and Microengineering
Дата:
1996-03-01
Аннотация:
This paper presents some theoretical considerations and experimental results carried out to investigate the potential use of corrugated silicon nitride membranes as a mechanical suspension in micromachined silicon capacitive accelerometers.
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