| Автор | Daniel Lapadatu |
| Автор | Andrzej Pyka |
| Автор | Jan Dziuban |
| Автор | Robert Puers |
| Дата выпуска | 1996-03-01 |
| dc.description | This paper presents some theoretical considerations and experimental results carried out to investigate the potential use of corrugated silicon nitride membranes as a mechanical suspension in micromachined silicon capacitive accelerometers. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | Corrugated silicon nitride membranes as suspensions in micromachined silicon accelerometers |
| Тип | paper |
| DOI | 10.1088/0960-1317/6/1/016 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 6 |
| Первая страница | 73 |
| Последняя страница | 76 |
| Выпуск | 1 |
