Автор | Daniel Lapadatu |
Автор | Andrzej Pyka |
Автор | Jan Dziuban |
Автор | Robert Puers |
Дата выпуска | 1996-03-01 |
dc.description | This paper presents some theoretical considerations and experimental results carried out to investigate the potential use of corrugated silicon nitride membranes as a mechanical suspension in micromachined silicon capacitive accelerometers. |
Формат | application.pdf |
Издатель | Institute of Physics Publishing |
Название | Corrugated silicon nitride membranes as suspensions in micromachined silicon accelerometers |
Тип | paper |
DOI | 10.1088/0960-1317/6/1/016 |
Electronic ISSN | 1361-6439 |
Print ISSN | 0960-1317 |
Журнал | Journal of Micromechanics and Microengineering |
Том | 6 |
Первая страница | 73 |
Последняя страница | 76 |
Выпуск | 1 |