A CMOS-compatible fluid density sensor
David Westberg; Oliver Paul; Gert Andersson; Henry Baltes; David Westberg; Presented on 22 October 1996, accepted for publication 9 April 1997; Oliver Paul; Presented on 22 October 1996, accepted for publication 9 April 1997; Gert Andersson; Presented on 22 October 1996, accepted for publication 9 April 1997; Henry Baltes; Presented on 22 October 1996, accepted for publication 9 April 1997
Журнал:
Journal of Micromechanics and Microengineering
Дата:
1997-09-01
Аннотация:
We report a CMOS-compatible resonant sensor to measure the density of fluids. The device is fabricated using a standard CMOS process followed by simple post-processing consisting of sacrificial aluminium etching and silicon bulk micromachining. The sample volume of liquid probed by the resonating structure is only 11 pl.
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