| Автор | David Westberg |
| Автор | Oliver Paul |
| Автор | Gert Andersson |
| Автор | Henry Baltes |
| Дата выпуска | 1997-09-01 |
| dc.description | We report a CMOS-compatible resonant sensor to measure the density of fluids. The device is fabricated using a standard CMOS process followed by simple post-processing consisting of sacrificial aluminium etching and silicon bulk micromachining. The sample volume of liquid probed by the resonating structure is only 11 pl. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Название | A CMOS-compatible fluid density sensor |
| Тип | paper |
| DOI | 10.1088/0960-1317/7/3/047 |
| Electronic ISSN | 1361-6439 |
| Print ISSN | 0960-1317 |
| Журнал | Journal of Micromechanics and Microengineering |
| Том | 7 |
| Первая страница | 253 |
| Последняя страница | 255 |
| Аффилиация | David Westberg; Presented on 22 October 1996, accepted for publication 9 April 1997 |
| Аффилиация | Oliver Paul; Presented on 22 October 1996, accepted for publication 9 April 1997 |
| Аффилиация | Gert Andersson; Presented on 22 October 1996, accepted for publication 9 April 1997 |
| Аффилиация | Henry Baltes; Presented on 22 October 1996, accepted for publication 9 April 1997 |
| Выпуск | 3 |
